MEMS magnetic field sensor

Please use this identifier to cite or link to this item: http://dspace.cityu.edu.hk/handle/2031/9047

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DC Field	Value	Language
dc.contributor.author	Kwok, Tak Chun	en_US
dc.date.accessioned	2019-01-17T04:30:17Z	-
dc.date.accessioned	2019-02-12T07:27:52Z	-
dc.date.available	2019-01-17T04:30:17Z	-
dc.date.available	2019-02-12T07:27:52Z	-
dc.date.issued	2017	en_US
dc.identifier.other	2017eektc821	en_US
dc.identifier.uri	http://144.214.8.231/handle/2031/9047	-
dc.description.abstract	Being part of a project of building a 3-axis MEMS Lorentz force magnetic field sensor, this study presents the conceptual design of its x-y axis counterpart with a novel attempt of its structure and of its transducing means. Simulations of an out-of-plane mode vibration structure are run on COMSOL, whereby the potential of a 30 cascaded clamped-clamped-beam resonator, equipped with a piezoelectric transducer, is investigated. By implementing frequency and dimensional sweep in simulations, displacement and surface strain profile were examined. Based on the results, the effective coverage area of the thin film piezoelectric layer is obtained; and upon which, the sensitivity of the system operates at its resonant frequency is predicted. With the help of the simulated results, comparisons against the actual fabricated device can be made in the future.	en_US
dc.title	MEMS magnetic field sensor	en_US
dc.contributor.department	Department of Electronic Engineering	en_US
dc.description.supervisor	Supervisor: Dr. Lee, Joshua E Y; Assessor: Mr. Pung, Edwin	en_US
Appears in Collections:	Electrical Engineering - Undergraduate Final Year Projects

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