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|Title:||MEMS magnetic field sensor|
|Authors:||Kwok, Tak Chun|
|Department:||Department of Electronic Engineering|
|Supervisor:||Supervisor: Dr. Lee, Joshua E Y; Assessor: Mr. Pung, Edwin|
|Abstract:||Being part of a project of building a 3-axis MEMS Lorentz force magnetic field sensor, this study presents the conceptual design of its x-y axis counterpart with a novel attempt of its structure and of its transducing means. Simulations of an out-of-plane mode vibration structure are run on COMSOL, whereby the potential of a 30 cascaded clamped-clamped-beam resonator, equipped with a piezoelectric transducer, is investigated. By implementing frequency and dimensional sweep in simulations, displacement and surface strain profile were examined. Based on the results, the effective coverage area of the thin film piezoelectric layer is obtained; and upon which, the sensitivity of the system operates at its resonant frequency is predicted. With the help of the simulated results, comparisons against the actual fabricated device can be made in the future.|
|Appears in Collections:||Electronic Engineering - Undergraduate Final Year Projects |
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